| 000 | 00536pam a2200169 a 4500 | ||
|---|---|---|---|
| 020 | _a0201108313 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 082 | 0 | 0 | _a621.381/73 |
| 100 | 1 | _aRunyan, W. R. | |
| 245 | 1 | 0 |
_aSemiconductor integrated circuit processing technology / _cW.R. Runyan, K.E. Bean. |
| 260 |
_aReading, Mass. : _bAddison-Wesley, _cc1990. |
||
| 300 |
_axviii, 683 p. : _bill. ; |
||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 700 | 1 | _aBean, Kenneth E. | |
| 942 | _cBK | ||
| 999 |
_c10049 _d10049 |
||