TY  - BOOK
AU  - Runyan,W.R.
AU  - Bean,Kenneth E.
TI  - Semiconductor integrated circuit processing technology
SN  - 0201108313
U1  - 621.381/73 
PY  - 1990///
CY  - Reading, Mass.
PB  - Addison-Wesley
KW  - Integrated circuits
KW  - Design and construction
KW  - Semiconductors
ER  -